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High-spectral-purity frequency-agile room-temperature sources in the terahertz spectrum are foundational elements for imaging, sensing, metrology, and communications. Here we present a chip-scale optical parametric oscillator based on an integrated nonlinear microresonator that provides broadly tunable single-frequency and multi-frequency oscillators in the terahertz regime. Through optical-to-terahertz down-conversion using a plasmonic nanoantenna array, coherent terahertz radiation spanning 2.8-octaves is achieved from 330 GHz to 2.3 THz, with ≈20 GHz cavity-mode-limited frequency tuning step and ≈10 MHz intracavity-mode continuous frequency tuning range at each step. By controlling the microresonator intracavity power and pump-resonance detuning, tunable multi-frequency terahertz oscillators are also realized. Furthermore, by stabilizing the microresonator pump power and wavelength, sub-100 Hz linewidth of the terahertz radiation with 10⁻¹⁵residual frequency instability is demonstrated. The room-temperature generation of both single-frequency, frequency-agile terahertz radiation and multi-frequency terahertz oscillators in the chip-scale platform offers unique capabilities in metrology, sensing, imaging and communications.

Dissipative Kerr soliton generation in chip-scale nonlinear resonators has recently observed remarkable advances, spanning from massively parallel communications, to self-referenced oscillators, and to dual-comb spectroscopy. Often working in the anomalous dispersion regime, unique driving protocols and dispersion in these nonlinear resonators have been examined to achieve the soliton and soliton-like temporal pulse shapes and coherent frequency comb generation. The normal dispersion regime provides a complementary approach to bridge the nonlinear dynamical studies, including the possibility of square pulse formation with flattop plateaus, or platicons. Here we report observations of square pulse formation in chip-scale frequency combs through stimulated pumping at one free spectral range and in silicon nitride rings with$+55{\mathrm{fs}}^2/\mathrm{mm}$normal group velocity dispersion. Tuning of the platicon frequency comb via a varied sideband modulation frequency is examined in both spectral and temporal measurements. Determined by second-harmonic autocorrelation and cross correlation, we observe bright square platicon pulse of 17 ps pulse width on a 19 GHz flat frequency comb. With auxiliary-laser-assisted thermal stabilization, we surpass the thermal bistable dragging and extend the mode-locking access to narrower 2 ps platicon pulse states, supported by nonlinear dynamical modeling and boundary limit discussions.

Femtosecond mode-locked laser frequency combs have served as the cornerstone in precision spectroscopy, all-optical atomic clocks, and measurements of ultrafast dynamics. Recently frequency microcombs based on nonlinear microresonators have been examined, exhibiting remarkable precision approaching that of laser frequency combs, on a solid-state chip-scale platform and from a fundamentally different physical origin. Despite recent successes, to date, the real-time dynamical origins and high-power stabilities of such frequency microcombs have not been fully addressed. Here, we unravel the transitional dynamics of frequency microcombs from chaotic background routes to femtosecond mode-locking in real time, enabled by our ultrafast temporal magnifier metrology and improved stability of dispersion-managed dissipative solitons. Through our dispersion-managed oscillator, we further report a stability zone that is more than an order-of-magnitude larger than its prior static homogeneous counterparts, providing a novel platform for understanding ultrafast dissipative dynamics and offering a new path towards high-power frequency microcombs.

Modern navigation systems integrate the global positioning system (GPS) with an inertial navigation system (INS), which complement each other for correct attitude and velocity determination. The core of the INS integrates accelerometers and gyroscopes used to measure forces and angular rate in the vehicular inertial reference frame. With the help of gyroscopes and by integrating the acceleration to compute velocity and distance, precision and compact accelerometers with sufficient accuracy can provide small‐error location determination. Solid‐state implementations, through coherent readout, can provide a platform for high performance acceleration detection. In contrast to prior accelerometers using piezoelectric or capacitive readout techniques, optical readout provides narrow‐linewidth high‐sensitivity laser detection along with low‐noise resonant optomechanical transduction near the thermodynamical limits. Here an optomechanical inertial sensor with an 8.2 µg Hz^−1/2velocity random walk (VRW) at an acquisition rate of 100 Hz and 50.9 µg bias instability is demonstrated, suitable for applications, such as, inertial navigation, inclination sensing, platform stabilization, and/or wearable device motion detection. Driven into optomechanical sustained‐oscillation, the slot photonic crystal cavity provides radio‐frequency readout of the optically‐driven transduction with an enhanced 625 µg Hz⁻¹sensitivity. Measuring the optomechanically‐stiffened oscillation shift, instead of the optical transmission shift, provides a 220× VRW enhancement over pre‐oscillation mode detection.